Any chance you may have dribbled some nute/water solution on them where they could have sustained a few tiny burns? I've heard that a bead of water can possibly magnify the light enough to cause a burn, but I'm not sure about that from experience. I always avoid leaving any water drops on the top sides of leaves, especially where closest to the light source - just in case... Anyway, the spots appear similar to the burn left when a leaf touches one of my CFL lights.